Modeling and Verification in Silicon Micro-Mechanical Structures

Silicon Micro-Ring Modulator Modeling

Oxidation smoothening of silicon machined micro- and nano-scale structures

Modeling and Control of Vibration in Mechanical Structures

All mechanical systems exhibit vibrational response when exposed to exter-nal disturbances. In many engineering applications vibrations are undesir-able and may even have harmful effects. Therefore, control of mechanicalvibration is an important topic and extensive research has been going on inthe field over the years.In active control of vibration, the ability to actuate th...

Suspended mechanical structures based on elastic silicon nanowire arrays.

We demonstrate a bottom-up/top-down combined method for the fabrication of horizontally suspended, well-oriented and size-controlled Si nanowire arrays. Mechanical beamlike structures composed of multiple ordered arrays consecutively linked by transversal microspacers are obtained by this method. Such structures are used to investigate the mechanical elasticity of the nanowire arrays by atomic ...

Size Effects on Mechanical Properties of Micro/Nano Structures

Experiments on Microand Nano-mechanical systems (M/NEMS) have shown that their behavior upon bending loads departs in many cases from the classical predictions using Euler-Bernoulli theory and Hooke’s law. This anomalous response has usually been seen as a dependence of the material properties with the size of the structure, in particular thickness. A theoretical model that allows for quantitat...